Higher order modes excitation of electrostatically actuated clamped–clamped microbeams: experimental and analytical investigation

Author: Jaber Nizar   Ramini Abdallah   Carreno Armando A A   Younis Mohammad I  

Publisher: IOP Publishing

E-ISSN: 1361-6439|26|2|25008-25018

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.2, 2016-02, pp. : 25008-25018

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