Local residual stress monitoring of aluminum nitride MEMS using UV micro-Raman spectroscopy

Author: Choi Sukwon   Griffin Benjamin A  

Publisher: IOP Publishing

E-ISSN: 1361-6439|26|2|25009-25012

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.2, 2016-02, pp. : 25009-25012

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