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Author: Ishikawa Noriaki Ikeda Kentaro Sawada Renshi
Publisher: IOP Publishing
E-ISSN: 1361-6439|26|3|35002-35012
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.3, 2016-03, pp. : 35002-35012
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Abstract
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