An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry

Author： Lullin Justine   Bargiel Sylwester   Lemoal Patrice   Perrin Stéphane   Albero Jorge   Passilly Nicolas   Froehly Luc   Lardet-Vieudrin Franck   Gorecki Christophe  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|11|115013-115024

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115013-115024

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Temperature dependence of the scanning performance of an electrostatic microscanner

By Ishikawa Noriaki   Ikeda Kentaro   Sawada Renshi  

Journal of Micromechanics and Microengineering, Vol. 26, Iss. 3, 2016-03 ,pp. : 35002-35012

IOP Publishing

Access to resources Recommend Favorite

Numerically controlled sacrificial plasma oxidation using array-type electrode toward high-throughput deterministic machining

By Yamauchi Yasuhisa Sano; Keinosuke Yoshinaga; Shohei Kamisaka; Hidekazu Mimura; Satoshi Matsuyama; Kazuto  

International Journal of Nanomanufacturing, Vol. 7, Iss. 3-4, 2011-09 ,pp. : 289-297

Inderscience Publishers

Access to resources Recommend Favorite

Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System

By Zhang Jiahong   Chen Jianxiang   Li Min   Ge Yixian   Wang Tingting   Shan Peng   Mao Xiaoli  

Micromachines, Vol. 9, Iss. 3, 2018-02 ,pp. : 104-104

MDPI

Access to resources Recommend Favorite

Riding Quality Model for Asphalt Pavement Monitoring Using Phase Array Type L-band Synthetic Aperture Radar (PALSAR)

By Suanpaga Weerakaset   Yoshikazu Kamiya  

Remote Sensing, Vol. 2, Iss. 11, 2010-11 ,pp. : 2531-2546

MDPI

Access to resources Recommend Favorite

A novel vertical comb-drive electrostatic actuator using a one layer process

By Hailu Zewdu   He Siyuan   Mrad Ridha Ben  

Journal of Micromechanics and Microengineering, Vol. 24, Iss. 11, 2014-11 ,pp. : 115016-115026

IOP Publishing

Access to resources Recommend Favorite