Annealing-related electrical and piezoresistive properties of Band As-implanted LPCVD silicon films

Publisher: Edp Sciences

E-ISSN: 1286-4897|3|1|47-53

ISSN: 1155-4320

Source: Journal de Physique III, Vol.3, Iss.1, 1993-01, pp. : 47-53

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