Ion distribution functions at the electrodes of capacitively coupled high-pressure hydrogen discharges

By Schüngel Edmund   Mohr Sebastian   Schulze Julian   Czarnetzki Uwe   Kushner Mark J  

Plasma Sources Science and Technology, Vol. 23, Iss. 1, 2014-02 ,pp. : 15001-15008

IOP Publishing

Access to resources Recommend Favorite

Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms

By Bruneau B   Novikova T   Lafleur T   Booth J P   Johnson E V  

Plasma Sources Science and Technology, Vol. 23, Iss. 6, 2014-12 ,pp. : 65010-65018

IOP Publishing

Access to resources Recommend Favorite

Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect

By Lafleur T  

Plasma Sources Science and Technology, Vol. 25, Iss. 1, 2016-02 ,pp. : 13001-13022

IOP Publishing

Access to resources Recommend Favorite

The Electrical Asymmetry Effect - A novel and simple method for separate control of ion energy and flux in capacitively coupled RF discharges

By  

Journal of Physics: Conference Series , Vol. 162, Iss. 1, 2009-04 ,pp. : 110-125

IOP Publishing

Access to resources Recommend Favorite

Negative-ion surface production in hydrogen plasmas: modeling of negative-ion energy distribution functions and comparison with experiments

By Ahmad A.   Dubois J.   Pasquet T.   Carrère M.   Layet J.M.   Faure J.B.   Cartry G.   Kumar P.   Minéa T.   Mochalskyy S.   Simonin A.  

Plasma Sources Science and Technology, Vol. 22, Iss. 2, 2013-04 ,pp. : 25006-25020

IOP Publishing

Access to resources Recommend Favorite