The Electrical Asymmetry Effect - A novel and simple method for separate control of ion energy and flux in capacitively coupled RF discharges

Publisher: IOP Publishing

ISSN: 1742-6596

Source: Journal of Physics: Conference Series , Vol.162, Iss.1, 2009-04, pp. : 110-125

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract