氧气通量对反应溅射法制备HfO2薄膜生长过程的影响 Effect of O2 Flux on the Growth Process of HfO2 Thin Films Deposited by Reactive Sputtering

Author: 杨宇桐   唐武  

Publisher: 汉斯出版社

ISSN: 2326-3520

Source: Advances in Condensed Matter Physics, Vol.02, Iss.01, 2013-02, pp. : 12-16

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Abstract