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Publisher: Springer Publishing Company
Founded in: 1995
Total resources: 27
E-ISSN: 1432-1858
ISSN: 0946-7076
Subject: TP Automation Technology , Computer Technology
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Microsystem Technologies
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Micro molding for double-sided micro structuring of SU-8 resist
By Oerke A.,Büttgenbach S.,Dietzel A. in (2014)
Microsystem Technologies , Vol. 20, Iss. 4-5, 2014-04 , pp.![](/images/ico/ico5.png)
Compact optical position feedback scheme for MOEMS mirrors
By Tortschanoff Andreas,Baumgart M.,Holzmann D.,Lenzhofer M.,Sandner T.,Kenda A. in (2014)
Microsystem Technologies , Vol. 20, Iss. 4-5, 2014-04 , pp.![](/images/ico/ico5.png)
Design, fabrication and testing of a piezoelectric energy microgenerator
By Alamin Dow Ali,Bittner Achim,Schmid Ulrich,Kherani Nazir in (2014)
Microsystem Technologies , Vol. 20, Iss. 4-5, 2014-04 , pp.![](/images/ico/ico5.png)
By Pelegrini Silvia,Adami Andrea,Collini Cristian,Conci Paolo,Araújo Clodoaldo,Guarnieri Vittorio,Güths Saulo,Pasa André,Lorenzelli Leandro in (2014)
Microsystem Technologies , Vol. 20, Iss. 4-5, 2014-04 , pp.![](/images/ico/ico5.png)
Silicon cantilevers with piezo-resistive measuring bridge for tactile line measurement
By Frank Thomas,Doering L.,Heinrich G.,Thronicke N.,Löbner C.,Völlmeke St.,Steinke A.,Reich S. in (2014)
Microsystem Technologies , Vol. 20, Iss. 4-5, 2014-04 , pp.![](/images/ico/ico5.png)
By Pössinger T.,Bolzmacher C.,Bodelot L.,Triantafyllidis N. in (2014)
Microsystem Technologies , Vol. 20, Iss. 4-5, 2014-04 , pp.![](/images/ico/ico5.png)
By Fan Yiqiang,Li Huawei,Foulds Ian in (2014)
Microsystem Technologies , Vol. 20, Iss. 4-5, 2014-04 , pp.![](/images/ico/ico5.png)
A microbial fuel cell powering an all-digital piezoresistive wireless sensor system
By Tommasi T.,Chiolerio A.,Crepaldi M.,Demarchi D. in (2014)
Microsystem Technologies , Vol. 20, Iss. 4-5, 2014-04 , pp.![](/images/ico/ico5.png)
By Fiala P.,Drexler P.,Nespor D. in (2014)
Microsystem Technologies , Vol. 20, Iss. 4-5, 2014-04 , pp.