Ni- and Co-based silicides for advanced CMOS applications

Author： Kittl J.A.   Lauwers A.   Chamirian O.   Van Dal M.   Akheyar A.   De Potter M.   Lindsay R.   Maex K.  

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 158-165

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