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Author: Kittl J.A. Lauwers A. Chamirian O. Van Dal M. Akheyar A. De Potter M. Lindsay R. Maex K.
Publisher: Elsevier
ISSN: 0167-9317
Source: Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 158-165
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