Characterization of CF x films plasma chemically deposited from C 3 F 8 /C 2 H 2 precursors

Author: Koshel D.   Ji H.   Terreault B.   Cote A.   Ross G.G.   Abel G.   Bolduc M.  

Publisher: Elsevier

ISSN: 0257-8972

Source: Surface and Coatings Technology, Vol.173, Iss.2, 2003-08, pp. : 161-171

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