Optical emission study of CH 4 +CHF 3 ECR plasma and properties of a-C:F:H films

Author: Xin Y.   Ning Z.Y.   Ye C.   Lu X.H.   Xiang S.L.   Du W.   Huang S.   Chen J.   Cheng S.H.  

Publisher: Elsevier

ISSN: 0257-8972

Source: Surface and Coatings Technology, Vol.173, Iss.2, 2003-08, pp. : 172-177

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