Crystallinity of Al 2 O 3 films deposited by metalorganic chemical vapor deposition

Author: Pradhan S.K.   Reucroft P.J.   Ko Y.  

Publisher: Elsevier

ISSN: 0257-8972

Source: Surface and Coatings Technology, Vol.176, Iss.3, 2004-01, pp. : 382-384

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content