Preparation and structural characteristics of ZrT 4 thin films by plasma enhanced chemical vapor deposition

Author: Lee W.G.  

Publisher: Springer Publishing Company

ISSN: 0261-8028

Source: Journal of Materials Science Letters, Vol.22, Iss.23, 2003-12, pp. : 1679-1680

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content