Design and fabrication of an AT-cut quartz phononic Lamb wave resonator

Author: Hung Chia-Hao   Wang Wei-Shan   Lin Yu-Ching   Liu Ting-Wei   Sun Jia-Hong   Chen Yung-Yu   Esashi Masayoshi   Wu Tsung-Tsong  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65025-65030

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