Design and fabrication of aluminum nitride Lamb wave resonators towards high figure of merit for intermediate frequency filter applications

Author： Liang Ji   Zhang Hongxiang   Zhang Daihua   Duan Xuexin   Zhang Hao   Pang Wei  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|3|35016-35025

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35016-35025

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