Author: Martyak N.M. Ricou P.
Publisher: Elsevier
ISSN: 1369-8001
Source: Materials Science in Semiconductor Processing, Vol.6, Iss.4, 2003-08, pp. : 225-233
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
Plasma cleaning technology in the dual damascene process
By Kang T.-K.
Microelectronic Engineering, Vol. 71, Iss. 1, 2004-01 ,pp. :