Zn distribution and location, luminescence measurement after Zn channeled implantation in GaN and RTA annealing

Author: Ding F.-R.   Vantomme A.   He W.-H.   Zhao Q.   Pipeleers B.   Jacobs K.   Moerman I.   Iakoubovskii K.   Adriaenssens G.J.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.6, Iss.4, 2003-08, pp. : 193-195

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