Tilted Back Exposure for Lightly Doped Drain Structure in Metal Induced Lateral Crystallization Poly Si Thin Film Transistors

Author: Son Se Wan   Byun Chang Woo   Lee Yong Woo   Park Jae Hyo   Joo Seung Ki  

Publisher: American Scientific Publishers

ISSN: 1533-4899

Source: Journal of Nanoscience and Nanotechnology, Vol.13, Iss.10, 2013-10, pp. : 7070-7072

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