Electron holography study of voids in self-annealed implanted silicon

Author: Beeli C.   Matteucci G.   Lulli G.   Merli P. G.   Migliori A.  

Publisher: Taylor & Francis Ltd

ISSN: 1362-3036

Source: Philosophical Magazine Letters, Vol.78, Iss.6, 1998-12, pp. : 445-451

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Abstract