Refractory metal-based low-resistance ohmic contacts for submicron GaAs heterostructure devices

Author: Messica A.   Meirav U.   Shtrikman H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.257, Iss.1, 1995-02, pp. : 54-57

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Abstract