Formation of WSi-based ohmic contacts to n-type GaAs

Author: Oku T.   Furumai M.   Uchibori C.J.   Murakami M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.300, Iss.1, 1997-05, pp. : 218-222

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract