Author： Osburn C.M. Bellur K.R.
Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 428-436
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Abstract
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A low temperature integrated aluminum metallization technology for ULSI devices
By Guo T. Chen L.Y. Brown D. Besser P. Voss S. Mosely R.
Thin Solid Films, Vol. 332, Iss. 1, 1998-11 ,pp. :
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