Interface properties of a-Si:H/a-SiC x :H superlattice

Author： Chen G.   Guo Y.   Yao J.   Zhang F.   Song Z.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.258, Iss.1, 1995-03, pp. : 132-136

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