Structural and optical properties of r.f.-sputtered Si x C 1-x :O films

Author： Ech-Chamikh E. Ameziane E.L. Bennouna A. Azizan M. Nguyen Tan T.A. Lopez-Rios T.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.259, Iss.1, 1995-04, pp. : 18-24

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