A thermodynamic and experimental approach to ReSi 2 LPCVD

Author: Dutron A.-M.   Blanquet E.   Bernard C.   Bourhila N.   Madar R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.259, Iss.1, 1995-04, pp. : 25-31

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Abstract