Preparation of silicon oxynitride (SiO x N y ) thin films by pulsed laser deposition

Author： Xiao R.-F.   Ng L.C.   Jiang C.   Yang Z.Y.   Wong G.K.L.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.260, Iss.1, 1995-05, pp. : 10-13

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