Conductivity of boron-implanted polycrystalline thin silicon films

Author: Mansour F.   Bouchemat M.   Boukezzata M.   Touidjen N.H.   Bielle-Daspet D.   Mirouh K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.261, Iss.1, 1995-06, pp. : 12-17

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Abstract