Nanoindentation of amorphous aluminum oxide films I. The influence of the substrate on the plastic properties

Author: Chechenin N.G.   Bottiger J.   Krog J.P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.261, Iss.1, 1995-06, pp. : 219-227

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Abstract