Nanoindentation of amorphous aluminum oxide films II. Critical parameters for the breakthrough and a membrane effect in thin hard films on soft substrates

Author： Chechenin N.G.   Bottiger J.   Krog J.P.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.261, Iss.1, 1995-06, pp. : 228-235

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