Nanoindentation of amorphous aluminum oxide films III: The influence of the substrate on the elastic properties

Author: Chechenin N.G.   Bottiger J.   Krog J.P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.304, Iss.1, 1997-07, pp. : 70-77

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Abstract