Properties of titanium oxide film prepared by reactive cathodic vacuum arc deposition

Author: Takikawa H.   Matsui T.   Sakakibara T.   Bendavid A.   Martin P.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.348, Iss.1, 1999-07, pp. : 145-151

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Abstract