Characterization of a d.c. Titanium tetraisopropoxide/H 2 /N 2 plasma using emission spectroscopy

Author: Kulakowska-Pawlak B.   Zyrnicki W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.266, Iss.1, 1995-09, pp. : 8-13

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Abstract