Emission spectroscopy of a surface wave sustained N 2 -H 2 discharge

Author： Tatarova E.   Dias F.M.   van Kuijk H.   Ferreira C.M.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.69, Iss.1, 2002-12, pp. : 189-193

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