Influence of a d.c. substrate bias on the resistivity, composition, crystallite size and microstrain of WTi and WTi-N films

Author: Ramarotafika H.   Lemperiere G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.266, Iss.2, 1995-10, pp. : 267-273

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Abstract