Influence of substrate temperature and bias voltage on the optical transmittance of TiN films

Author: Durusoy H.Z.   Duyar O.   Aydinli A.   Ay F.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.70, Iss.1, 2003-02, pp. : 21-28

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Abstract