Effect of process parameter changes on the composition of magnetron sputtered and evaporated TiN and AlN films measured by UHV in-situ techniques

By Roth R.   Schubert J.   Martin M.   Fromm E.  

Thin Solid Films, Vol. 270, Iss. 1, 1995-12 ,pp. : 320-324

Elsevier

Access to resources Recommend Favorite

In-situ ellipsometry on sputtered dielectric and magneto-optic thin films

By Heckens S.   Woollam J.A.  

Thin Solid Films, Vol. 270, Iss. 1, 1995-12 ,pp. : 65-68

Elsevier

Access to resources Recommend Favorite

Surface topography of amorphous Zr 65.0 Al 7.5 Cu 27.5 alloy films around the glass transition - An in-situ UHV-STM study

By Reinker B.   Geisler H.   Moske M.   Samwer K.  

Thin Solid Films, Vol. 275, Iss. 1, 1996-04 ,pp. : 240-243

Elsevier

Access to resources Recommend Favorite

In-situ ultra-high vacuum studies of electromigration in copper films

By Jo B.H.   Vook R.W.  

Thin Solid Films, Vol. 262, Iss. 1, 1995-06 ,pp. : 129-134

Elsevier

Access to resources Recommend Favorite

In-situ X-ray studies of phase transformations in lead zirconate titanate thin films during annealing

By Aungkavattana P.   Trolier-McKinstry S.   Haartz B.   Ruud C.O.  

Thin Solid Films, Vol. 268, Iss. 1, 1995-11 ,pp. : 102-107

Elsevier

Access to resources Recommend Favorite