Physics of very thin ITO conducting films with high transparency prepared by DC magnetron sputtering

Author： Minami T.   Sonohara H.   Kakumu T.   Takata S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 37-42

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