CoSi 2 and TiSi 2 for Si/SiGe heterodevices

Author: Gluck M.   Schuppen A.   Rosler M.   Heinrich W.   Hersener J.   Konig U.   Yam O.   Eizenberg M.   Cytermann C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 549-554

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Abstract