Silicon-on-insulator material qualification for low-power complementary metal-oxide semiconductor application

Author： Mendicino M.A.   Vasudev P.K.   Maillot P.   Hoener C.   Baylis J.   Bennett J.   Boden T.   Jackett S.   Huffman K.   Godwin M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 578-583

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