Molecular dynamics and quasidynamic simulations of low-energy particle bombardment effects during vapour-phase crystal growth: 10-50 eV Si and In atoms incident on (2 x 1)-terminated Si(001)

Author: Kitabatake M.   Greeene J.E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.272, Iss.2, 1996-01, pp. : 271-288

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Abstract