Numerical simulation of the characteristics of the different metallic species falling on the growing film in d.c. magnetron sputtering

By Malaurie A.   Bessaudou A.  

Thin Solid Films, Vol. 286, Iss. 1, 1996-09 ,pp. : 305-316

Elsevier

Access to resources Recommend Favorite

Simulation of the MO film deposition in the magnetron sputtering discharge

By Ishida M.   Yamaguchi Y.   Yamamura Y.  

Thin Solid Films, Vol. 334, Iss. 1, 1998-12 ,pp. : 225-229

Elsevier

Access to resources Recommend Favorite

SiC film deposition by DC magnetron sputtering

By Gou L.   Qi C.   Ran J.   Zheng C.  

Thin Solid Films, Vol. 345, Iss. 1, 1999-05 ,pp. : 42-44

Elsevier

Access to resources Recommend Favorite

Composite germanium/C:H films prepared by DC unbalanced magnetron sputtering

By Biederman H.   Stundzia   Slavnska D.   Zalman   Pesicka   Vanecek M.   Zemek   Fukarek W.  

Thin Solid Films, Vol. 351, Iss. 1, 1999-08 ,pp. : 151-157

Elsevier

Access to resources Recommend Favorite

Deposition of TiC films by dual source dc magnetron sputtering

By Inoue S.   Wada Y.   Koterazawa K.  

Vacuum, Vol. 59, Iss. 2, 2000-11 ,pp. : 735-741

Elsevier

Access to resources Recommend Favorite