X-ray double crystal and X-ray topographic characterization of silicon carbide thin films on silicon, titanium carbide, 6H-silicon carbide, and aluminum nitride/sapphire substrates

Author： Chaudhuri J.   Thokala R.   Edgar J.H.   Sywe B.S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.274, Iss.1, 1996-03, pp. : 23-30

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