Author： Thonissen M. Berger M.G. Arens-Fischer R. Gluck O. Kruger M. Luth H.
Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.276, Iss.1, 1996-04, pp. : 21-24
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Formation of porous silicon on patterned substrates
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