Porous silicon formation by stain etching

Author: Vazsonyi E.   Szilagyi E.   Petrik P.   Horvath Z.E.   Lohner T.   Fried M.   Jalsovszky G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.388, Iss.1, 2001-06, pp. : 295-302

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Abstract