Formation of porous silicon on patterned substrates

Author: Kruger M.   Arens-Fischer R.   Thonissen M.   Munder H.   Berger M.G.   Luth H.   Hilbrich S.   Theiss W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.276, Iss.1, 1996-04, pp. : 257-260

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Abstract