Thin TiC x films chemically vapour deposited onto cemented carbides from the TiCl 4 -CCl 4 -H 2 mixture

Author： Konyashin I.Y.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.278, Iss.1, 1996-05, pp. : 37-44

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