Hardness measurements at shallow depths on ultra-thin amorphous carbon films deposited onto silicon and Al 2 O 3 -TiC substrates

Author： Lemoine P.   Zhao J.F.   Quinn J.P.   McLaughlin J.A.   Maguire P.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.379, Iss.1, 2000-12, pp. : 166-172

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