Formation of Ge nanocrystals in amorphous GeO x and SiGeO x alloy films

Author: Zacharias M.   Blasing J.   Lohmann M.   Christen J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.278, Iss.1, 1996-05, pp. : 32-36

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Abstract