Preparation of Ta 2 Al intermetallic compound films and their application as diffusion barriers to Cu penetration

Author: Ohta A.   Taguchi M.   Noya A.   Takeyama M.   Sase T.   Sasaki K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.278, Iss.1, 1996-05, pp. : 6-11

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Abstract